Description
List of Equipment:
1x STANGL Silex WB Isotex 2400: nominal throughput 2400 cells/h, vintage 2008, process Acidic Isotex.
1x STANGL Silex WB PSG 2400: nominal throughput 2400 cells/h, vintage 2008, process PSG removal.
1x STANGL WPA – SAW damage: nominal throughput 1200 cells/h, vintage 2006, process Acidic Isotex. This equipment was intended for alkaline texturing but an upgrade in year 2007 was added to convert to Acidic.
1x STANGL WPA – Auto PSG removal: nominal throughput 1200 cells/h, vintage 2007, process PSG removal.
1x SEMCO Engineering DF5200+: 8 tubes, 400 cells per boat (SiC) double side diffusion, 10 SiC boats, automation by Develop – Dysfer II 3200 wafers/hour, Air Products POCl3 automatic dispenser, still supported by Semco Technologies. Vintage 2009, process Phosphorous Diffusion.
1x SEMCO Engineering DF5200+: 8 tubes, 400 cells per boat (SiC) double side diffusion, 12 SiC boats, automation by Develop – Dysfer II 3200 wafers/hour, Air Products POCl3 automatic dispenser, still supported by Semco Technologies. Vintage 2010, process Phosphorous Diffusion.
1x Roth & Rau SiNa L extended: pumps by Edwards (booster EH4200 – main vacuum GV600) x3, automation by Baccini. Vintage 2007. Process PECVD
1x Roth & Rau SiNa XXL: pumps by Oerlikon (booster WSU2001 – main vacuum SP630F) x4, automation by Applied Materials. Vintage 2008. Process PECVD
1x Applied Material Baccini Esatto Double Printing Soft Line: loading from stack magazines, item 1 + dryer and buffer, item 2 + dryer and buffer, item 3 Front 1 with S.E. and bobcat options + dryer and buffer, item 4 Front 2 double print and bobcat option, item 5 with Pasan Sun simulator and 24 bins. Vintage 2010.
1x Applied Material Baccini Soft Line: loading from stack magazines, item 1 + dryer and buffer, item 2 + dryer and buffer, item 3 Front 1 with stainless steel ball bearing , item 4 laser edge insulation, item 5 with Pasan Sun simulator and 24 bins. Vintage 2008.
1x Applied Material Baccini Soft Line: loading from stack magazines, item 1 + dryer and buffer, item 2 + dryer and buffer, item 3 Front 1, item 4 laser edge insulation, item 5 with Pasan Sun simulator and 24 bins. Vintage 2009.
1x Baccini Rotary Line: loading from stack magazines, item 1 + dryer, item 2 + dryer, item 3 Front 1, item 4 laser edge insulation, item 5 with Pasan Sun simulator and 24 bins: Vintage 2009.
LAB Tools:
1x SEMILAB WT2000: EDDY, LBIC, u-PCD, reflectivity-resistivity-lifetime-LBIC maps
1x CORRESCAN
1x SHERRESCAN
